http://rdf.ncbi.nlm.nih.gov/pubchem/patent/FR-2641000-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_37f4922dfb7777b019e504b885211b8e |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-452 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-452 |
| filingDate | 1988-12-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 1990-06-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | FR-2641000-A1 |
| abstract | The invention relates to a method and a device for chemical deposition on a substrate from at least one gas phase containing the elements to be deposited. The method consists in causing the gas phase to circulate successively in two distinct zones: a first zone of electronic activation Ze in which at least a fraction of the gas phase is subjected to an alternating electronic field to ensure the formation of a cold plasma, a second thermal activation zone Zt in which is placed a substrate S which is heated to a temperature suitable for ensuring the deposition. The two zones are thermally and electrically decoupled. The process of the invention, which therefore leads to operating the two activation modes separately without significant interaction with one another, makes it possible to very significantly reduce the temperatures of use in the thermal activation zone. and to work in a very wide pressure range. |
| priorityDate | 1988-12-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 13.