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publicationDate 2021-12-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2021191892-A
titleOfInvention Methods and systems for the delivery of vanadium compounds
abstract PROBLEM TO BE SOLVED: To provide a method for delivering a vanadium compound. SOLUTION: The method is to place vanadium tetrachloride in a delivery container, deliver vanadium tetrachloride to a reaction chamber that communicates fluidly with the delivery vessel, and deliver the decomposition product of vanadium tetrachloride to the reaction chamber. And / or applying vanadium tetrachloride to a substrate placed in the reaction chamber to form a layer containing vanadium on the substrate. [Selection diagram] FIG. 6
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