Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2a3bb4ae410da4be8184239adc5ab1c0 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45553 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-14 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-455 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-452 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45557 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-52 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45561 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45553 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4402 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-448 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455 |
filingDate |
2021-05-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_47923f8cd4c890594366b0cc68b7ab19 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7e5f6eac5fb3ac2e7cfef57e217fafe6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_339feebf01c91b5a88f8e4f313186a5f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_07f6ed8ccc9497566c5c1fdb0c168556 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_342415f395d57937c7ca9e65a33e02be http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7cb8c8c2c5852551c5196c8fee821632 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_231ce5715ac08c044117ff10bcf12383 |
publicationDate |
2021-12-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
JP-2021191892-A |
titleOfInvention |
Methods and systems for the delivery of vanadium compounds |
abstract |
PROBLEM TO BE SOLVED: To provide a method for delivering a vanadium compound. SOLUTION: The method is to place vanadium tetrachloride in a delivery container, deliver vanadium tetrachloride to a reaction chamber that communicates fluidly with the delivery vessel, and deliver the decomposition product of vanadium tetrachloride to the reaction chamber. And / or applying vanadium tetrachloride to a substrate placed in the reaction chamber to form a layer containing vanadium on the substrate. [Selection diagram] FIG. 6 |
priorityDate |
2020-05-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |