| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2b5ee93d55e837563f1cc5509aca8042 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S505-741 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-455
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4551
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-452
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45514 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-511
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-452
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 |
| filingDate |
1989-05-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1998-04-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cd4187924f96a04085c3da542057812c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_145515ee2868eeed62a7846bb8a75956
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5ad39ffb94ca091e693ed847bb93a978
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d87ac9f46886a8b22e03dca1de1f7b5c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5bb6226f1e720834d0f03a63d1274fa8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_00fcb9df3d8e13facd5299883807051f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_618c1a9407ba4e30c95c23aa48547c57 |
| publicationDate |
1998-04-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-0136863-B1 |
| titleOfInvention |
Manufacturing method of high flux active species |
| abstract |
none |
| priorityDate |
1988-05-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |