| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5a2c13cd8c31895cdcd8a5a8c17adea8 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-007
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D3-062
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3127
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-312 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-452
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-60
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02348
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02271
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02118 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D3-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D1-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D7-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-452 |
| filingDate |
2003-04-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_85db5cc5d0d20bfde86fd816f83a3912
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_69d5a948b547454923e0f19d9d4379a4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_77b2817f193d9b9f991fbae09510b1d7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1d8201ffc5fb78c01e20e244fdc01f4f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_53954434958320cd05d438663fd2da26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_63183165fabdd06c98b5c259b838e05c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_991a48c161388a6c7e44eff7e813fe89 |
| publicationDate |
2003-11-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-200306358-A |
| titleOfInvention |
Process modules for transport polymerization of low epsilon thin films |
| abstract |
A Process Module ("PM") is designed to facilitate Transport Polymerization ("TP") of precursors that are useful for preparations of low Dielectric Constant ("ε") films. The PM consists primarily of a Material Delivery System ("MDS") with a high temperature Vapor Phase Controller ("VFC"), a TP Reactor, a Treatment Chamber, a Deposition Chamber and a Pumping System. The PM is designed to facilitate TP for new precursors and for film deposition and stabilization processes. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114040808-A |
| priorityDate |
2002-04-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |