| abstract |
A vapor deposition method for preparing a phosphorus-free amorphous lithium-containing oxide or oxynitride compound comprises at least a lithium source, an oxygen source, a nitrogen source in the case of an oxynitride compound, and a source of one or more glass-forming elements. Or providing a gaseous source of each component element of the compound comprising sources; Heating the substrate to substantially 180° C. or higher; And co-depositing component elements from gaseous sources on the heated substrate, the component elements reacting on the substrate to form an amorphous compound. |