| abstract |
Process for the large-area coating of substrates under atmospheric pressure conditions, in which in a plasma source (1, 1 '), a first gas stream (10) is guided, the plasma from a large-volume plasma (2) from the plasma source (1, 1' drives) and the plasma generated by at least one slot nozzle (3 ') or directing a plurality of nozzles (3) having different cross-sectional geometries onto a surface of the substrate (4) to be coated which is moved within a sealed reaction chamber (5) or through the reaction chamber; the layer formation by adjusting the volume flows, the flow velocities and / or the flow directions of the plasma (12) and at least one second gas stream (6) and the distance of the nozzle opening (s) (3 '') for the plasma and a predeterminable internal pressure in the reaction chamber (5), by means of a Abgasabsaugung (7), directly on the surface of the substrate (4) by physicochemical reaction of at least one component a precursor takes place which, as part of the at least second gas stream (6), enters the reaction chamber (5) and into the ... |