| abstract |
In one embodiment, a plasma source includes: a first electrode configured to transport a first perforation through which one or more plasma source gases pass; and an insulator configured to surround the outer periphery of the first electrode and the The first electrode is in contact; and the second electrode is disposed against the insulator with an outer periphery of the second electrode such that the first and second electrodes and the insulator define a plasma generation cavity. The second electrode is configured to move the plasma product from the plasma generation chamber to the processing chamber. A power source provides power across the first and second electrodes to ignite the plasma using the one or more plasma source gases in the plasma generation chamber to generate the plasma product. One of the first electrode, the second electrode, and the insulator includes a port that provides a light signal from the plasma. |