http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003172872-A1

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filingDate 2003-01-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e450693c5488aba7ff91140f63fff7d6
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publicationDate 2003-09-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2003172872-A1
titleOfInvention Apparatus for cyclical deposition of thin films
abstract An apparatus for cyclical depositing of thin films on semiconductor substrates, comprising a process chamber having a gas distribution system with separate paths for process gases and an exhaust system synchronized with operation of valves dosing the process gases into a reaction region of the chamber.
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