| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a2bcaf91101a370a3d64e3190366357f |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-345
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45519
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-452
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45595 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-452 |
| filingDate |
2005-03-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_621cb3694e22e20e8344a90cca199b9f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c2390c6cabd850b095f0f6418d2ff839
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e5a44bbc76b75c63d334a4cdee3751b8 |
| publicationDate |
2010-08-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
AT-476535-T |
| titleOfInvention |
METHOD FOR FORMING THIN LAYERS OF SILICON NITRIDE ON SUBSTRATE SURFACES |
| priorityDate |
2004-03-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |