| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8f55aba8e5bca84d885b8cba5cc21f30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1700b15ccc0ef4a198064bfb365a1c74 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-318
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-452
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-509
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02274
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02112 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-314 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-509
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-318
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-452
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-522
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
| filingDate |
2001-07-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_af2d2b353ddb9fa361ad3e89024234f2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f6e286bdf64c135f995783daa60e5bd9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dfce6c499c9415d6ccbbafd3ff32a29b |
| publicationDate |
2002-12-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2002359242-A |
| titleOfInvention |
Film forming method and film forming apparatus, insulating film and semiconductor integrated circuit |
| abstract |
(57) [Problem] To provide a film forming method and a film forming apparatus capable of forming a boron carbon nitrogen film. SOLUTION: After a plasma 50 is generated in a cylindrical container 1, nitrogen atoms are mainly excited in the cylindrical container 1 and then reacted with boron and carbon to form a boron-carbon nitrogen film 61 on a substrate 60. . |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005210136-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014532297-A |
| priorityDate |
2001-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |