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publicationDate 2010-03-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20100024446-A
titleOfInvention Nitride film deposition method and deposition apparatus
abstract Introducing at least one nitrogen supply gas selected from hydrazine and nitrogen oxide into the catalytic reaction device, and ejecting the reactive gas generated by contacting this nitrogen supply gas with the catalyst, reacting the reactive gas with the compound gas, A method of depositing a nitride film is disclosed, which deposits a nitride film on a substrate.
priorityDate 2007-07-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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