| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B2204-32 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B31-0453
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B32-186
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-452
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45565
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-0281
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45574 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B31-04 |
| filingDate |
2014-05-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5bf875a6cfab8d9d3f0893229e2caef6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a4a78a3c1ff015f771ad33e2e5fe4050
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4df7601341e59a4fb10da999fe306d03 |
| publicationDate |
2016-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20160011638-A |
| titleOfInvention |
Method for producing graphene |
| abstract |
It provides a graphene generation method that can increase the size of graphene's domain. The catalytic metal layer 55 formed on the wafer W is activated to change into the activation catalyst metal layer 56 in the plasma CVD film forming apparatus 10 and the low reactive carbon containing degraded by the gas, C 2 H 4 gas to the plasma, and also the decomposition space (S2) a carbon-containing gas is C 2 H 2 gas in the heat of the high reactivity. |
| priorityDate |
2013-05-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |