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publicationDate 1997-07-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-5645947-A
titleOfInvention Silicon-containing deposited film
abstract A deposition film is formed on a substrate in a deposition space (A) by the chemical reaction between a gaseous precursor of a higher silicon halide or a higher halosilane formed in a decomposition space (B) and a separately-introduced gaseous, activated species of hydrogen, silane or a halosilane formed in a decomposition space (C).
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