http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-3429899-A1

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1af8df51ce24ca931ae718fb747f6aa0
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E10-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P70-50
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03G5-08278
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02425
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02576
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-452
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-448
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02532
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-202
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0245
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0262
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02579
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-448
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-452
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03G5-082
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205
filingDate 1984-08-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1483e143cd2cd4b146c4924d394cb061
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b739b096f786b1395946488de68b0b4a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a8135070f9750c3ce2d98094afe83b4f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e78d5ff5780fb4e75e3a299e2e166c77
publicationDate 1985-03-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber DE-3429899-A1
titleOfInvention METHOD FOR FORMING A DEPOSITION FILM
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/FR-2593965-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0241317-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0231660-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0226461-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0226462-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5135607-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0228870-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0228870-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0243074-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0226461-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0229707-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0229707-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5591492-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0241311-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/FR-2592524-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0242182-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0242182-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0233613-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0264722-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0241317-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0233613-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0264722-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0241311-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0140660-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0140660-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0231660-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0226462-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0243074-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0228295-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0228295-A2
priorityDate 1983-08-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-3209119-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-3331261-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/GB-2087930-A
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458392451
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414859283
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410066445
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6547
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID62695
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411502039
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID409301876
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7846
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6335

Total number of triples: 72.