patent/US-2017154757-A1

http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017154757-A1

Outgoing Links

Predicate	Object
assignee	http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2a3bb4ae410da4be8184239adc5ab1c0
classificationCPCAdditional	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-3321 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-334 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-335
classificationCPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32422 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B7-0035 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32862 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32357 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32449 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45557 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32816 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-452 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-511 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-505 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-52
classificationIPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-52 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-452 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32
filingDate	2017-02-09-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor	http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_96db0273cb5c1d803bc1020e7eea7f7b
publicationDate	2017-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	US-2017154757-A1
titleOfInvention	Method and system for in-situ formation of intermediate reactive species
abstract	A system and method for providing intermediate reactive species from a remote plasma unit to a reaction chamber are disclosed. The system includes a pressure control device to control a pressure at the remote plasma unit as intermediate reactive species from the remote plasma unit are provided to the reaction chamber.
isCitedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11274369-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11361990-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10714335-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10950432-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-D880437-S http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11087997-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11088002-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-D965044-S http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-D965524-S http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-D975665-S http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-D948463-S http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11081345-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11390945-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-D949319-S http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-D944946-S http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-D947913-S http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10818758-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-D940837-S http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-D930782-S http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10720322-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-D931978-S http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11114283-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-D935572-S http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11378337-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11282698-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10644025-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11374112-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10262859-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10249577-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11411088-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10804098-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11101370-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11469098-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11646184-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11646197-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11646204-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11646205-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11644758-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11094582-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-D990441-S http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11401605-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-D990534-S http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11398382-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11643724-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-D980814-S http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11396702-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-D981973-S http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11139308-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11393690-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10832903-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-D979506-S http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11639811-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10829852-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11430674-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-D980813-S http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10535516-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11289326-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11639548-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11430640-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11476109-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10529563-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11286558-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11286562-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11127617-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11664199-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11664245-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10731249-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10529542-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11658035-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10529554-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11094546-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10340135-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11417545-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11658029-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10312129-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11658030-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10340125-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11158513-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10741385-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11453946-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11649546-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11447861-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11447864-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11482412-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11674220-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10541333-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11387106-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10541173-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10811256-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11437241-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10886123-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10269558-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10559458-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11664267-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10319588-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11473195-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11171025-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11107676-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11168395-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11685991-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11164955-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10566223-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11139191-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10561975-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11680839-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11682572-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10361201-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11390946-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10851456-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10600673-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10343920-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10847371-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11488819-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11488854-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11676812-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10847366-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10844484-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11114294-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10844486-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10655221-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10590535-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11482533-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11695054-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10872771-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11482418-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11694892-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11410851-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10865475-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10367080-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10366864-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10867786-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11501956-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11688603-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11501968-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10975470-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11501973-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11499222-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10896820-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11499226-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10858737-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10364496-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10612136-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10612137-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11495459-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10604847-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10605530-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10892156-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10607895-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11492703-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10388509-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11205585-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11705333-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10883175-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10276355-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10643826-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10643904-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11127589-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11725277-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10083836-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10910262-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11718913-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11227782-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11387120-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10672636-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10665452-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11735445-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11735414-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10755922-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11735422-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10755923-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11217444-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11315794-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10658181-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10692741-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10934619-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11251068-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10928731-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11725280-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10923344-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10685834-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11244825-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10378106-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10283353-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10683571-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11242598-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11222772-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11233133-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11414760-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11521851-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11230766-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10290508-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11232963-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10410943-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11270899-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11515187-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11515188-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10943771-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10941490-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11227789-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10403504-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10388513-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11424119-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10023960-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10914004-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10381219-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11342216-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10381226-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11530483-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11530876-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11532757-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11572620-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10847365-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11746414-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11001925-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10395919-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11004977-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11742189-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10770286-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11742198-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11306395-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10438965-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10435790-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11581186-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11581220-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11295980-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11296189-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10312055-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10707106-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11355338-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11527403-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10458018-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11527400-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11749562-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11443926-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10446393-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11594450-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11594600-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10854498-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11056567-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11587815-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11587821-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10720331-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10714385-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10468261-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10468262-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11587814-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11610775-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11069510-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11345999-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10714315-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10714350-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10468251-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11610774-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10236177-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10658205-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11605528-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11339476-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10229833-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10134757-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11776846-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10483099-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11022879-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10734244-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10734497-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10480072-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11024523-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11769670-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10734223-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11769682-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11018002-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11018047-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11767589-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10867788-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11551925-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11251040-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11551912-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11453943-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11015245-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11251035-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11615980-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10504742-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11049751-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10501866-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11615970-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11637011-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11637014-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11781221-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11557474-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11781243-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11031242-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10787741-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10622375-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11629406-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11629407-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11626308-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11626316-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10322384-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10770336-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-D922229-S http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10784102-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10767789-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10510536-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-D903477-S http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11056344-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-D913980-S http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11562901-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11053591-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10797133-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10249524-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-D900036-S
priorityDate	2013-03-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type	http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate	Subject
isDiscussedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419517759 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419527240 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5976 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID123195 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6061 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559367

Total number of triples: 346.