http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020196061-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-44 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 |
| filingDate | 2020-03-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c3f1ba247ae0855045a6f81e40d10cde http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2d62fd4ddf0f68af4d842f77beeff4ad http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_52a6d4da2ffb804636a8f5d0d46b1f10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_35461eb44b3375a5381d66b661334d04 |
| publicationDate | 2020-10-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | WO-2020196061-A1 |
| titleOfInvention | Contamination treatment method for substrate treatment device and substrate treatment device |
| abstract | [Problem] To provide a substrate treatment device supplying a halogenated gas to a treatment container, wherein contamination from a nickel halide is reduced. [Solution] A contamination treatment method for a substrate treatment device comprising: a step in which a contamination treatment gas containing an acidified gas is supplied to a space subject to a contamination treatment, said space being either a component disposition space having a constituent component, which constitutes the substrate treatment device and contains nickel, disposed therein and a gas containing halogen flowing therethrough, or being a flow path on a downstream side of the component disposition space; and next, a step in which a purging gas is supplied to the space subject to the contamination treatment. |
| priorityDate | 2019-03-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 28.