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filingDate 2001-03-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2012-07-04-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2012-07-04-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-4966466-B2
titleOfInvention Method for forming oxide film, method for sputtering oxide film, method for sputtering oxynitride film, method for forming gate insulating film
abstract A method of forming an insulation film includes the steps of forming an insulation film on a substrate, and modifying a film quality of the insulation film by exposing the insulation film to atomic state oxygen O* or atomic state hydrogen nitride radicals NH* formed with plasma that uses Kr or Ar as inert gas.
priorityDate 2000-03-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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