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filingDate 2012-05-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2012-09-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2012231945-A1
titleOfInvention Ceramic material, member for semiconductor manufacturing equipment, sputtering target member and method for producing ceramic material
abstract A ceramic material according to the present invention mainly contains magnesium, aluminum, oxygen, and nitrogen, the ceramic material has the crystal phase of a MgO—AlN solid solution in which aluminum nitride is dissolved in magnesium oxide, the crystal phase serving as a main phase. Preferably, XRD peaks corresponding to the (200) and (220) planes of the MgO—AlN solid solution measured with CuKα radiation appear at 2θ=42.9 to 44.8° and 62.3 to 65.2°, respectively, the XRD peaks being located between peaks of cubic magnesium oxide and peaks of cubic aluminum nitride. More preferably, the XRD peak corresponding to the (111) plane appears at 2θ=36.9 to 39°, the XRD peak being located between a peak of cubic magnesium oxide and a peak of cubic aluminum nitride.
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