| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_515e5b565ac34445fedce957d369febb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8d245366834f29a16bfa6683a6aa8adc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0c070bf53844fc54ff15fb59e2908316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d51e4e5f0a597cf8e3d37578d4d7714e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7e2a6ba0bcf68f49578244535e54474d |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31663 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01B3-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D183-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02203
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02216
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D183-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3122
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B33-145
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31695
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L83-04 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D5-25 |
| filingDate |
2010-07-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_20c36acfbc9d039ca3f5d34b14d6cc94
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_811a5a6162a92655f92ed2ae3f5aaca4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_318a7f283f07a379ba4f7d114463d9e0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f2744b19ce8fd7eaac75a4766e38d1ca
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3b81bb6be8887e57f9f0a822c3f1fabf |
| publicationDate |
2010-11-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2010283133-A1 |
| titleOfInvention |
Film-forming composition, insulating film with low dielectric constant, formation method thereof, and semiconductor device |
| abstract |
In the invention, a silica sol prepared by hydrolyzing and condensing a silane compound represented by the following formula: Si(OR 1 ) 4 or R 2 n Si(OR 3 ) 4-n wherein R 1 s, R 2 (s) and R 3 (s) may be the same or different when a plurality of them are contained in the molecule and each independently represents a linear or branched C 1-4 alkyl group in the presence of a hydrophilic basic catalyst and a hydrophobic basic catalyst is used for a conventional porous-film forming composition. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103808416-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103808416-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104178034-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10604411-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9080063-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10203411-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11001501-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014124797-A1 |
| priorityDate |
2007-02-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |