| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02274
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0228
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76814
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76831
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31105
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3141
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31608
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02164
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02216 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-522 |
| filingDate |
2009-06-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2011-09-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2011526078-A |
| titleOfInvention |
Prevention and reduction of solvent and solution penetration into porous dielectrics using thin barrier layers |
| abstract |
Methods and apparatus are provided for processing a substrate. A porous dielectric layer is formed on the substrate. In some embodiments, the dielectric can be covered by a dense dielectric layer. The dielectric layer is patterned and a dense dielectric layer is conformally deposited on the substrate. The dense conformal dielectric layer seals the pores of the porous dielectric layer from contact with chemical species that may enter the pores. The portion of the dense conformal sealing dielectric layer covering the field region and the bottom of the pattern opening is removed by directional selective etching. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20150035593-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018064119-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016042576-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9279184-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019029619-A |
| priorityDate |
2008-06-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |