http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013526783-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-26 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02115 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31144 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02274 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate | 2011-04-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2013-06-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2013526783-A |
| titleOfInvention | Ultra-high selectivity ashing-removable hard mask membrane |
| abstract | A method of forming an amorphous carbon layer on a substrate in a substrate processing chamber includes introducing a hydrocarbon source into the processing chamber and argon alone or in combination with helium, hydrogen, nitrogen, and combinations thereof. The step of introducing into the processing chamber and the ratio of argon volume flow to hydrocarbon source volume flow is from about 10: 1 to about 20: 1, with substantially lower pressure processing from about 2 Torr to 10 Torr. Generating a plasma in the chamber and forming a conformal amorphous carbon layer on the substrate. [Selection] Figure 3 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102375870-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20220035900-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20150037641-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015070270-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102525779-B1 |
| priorityDate | 2010-05-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 163.