| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4d84d66b762b952e132f05e21150a9c5 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76898
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30655 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-283 |
| filingDate |
2019-06-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8faa3f1c785dc54064d036515d9e4cf6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d694b078cdcca25e873cdd969b2d499a |
| publicationDate |
2020-12-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-102019116019-A1 |
| titleOfInvention |
Production of components in substrates via a multi-stage etching process |
| abstract |
Process strategies and associated components in which recesses 15 with an aspect ratio greater than five are produced in a modular manner, this by using several etching processes, their respective independence being achieved in that respective protective layers 8, 13 act in at least one, preferably several subsequent etching processes. |
| priorityDate |
2019-06-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |