http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-3395490-B2
Outgoing Links
Predicate | Object |
---|---|
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
filingDate | 1995-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2003-04-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2003-04-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-3395490-B2 |
titleOfInvention | Resist ashing method and ashing apparatus used therefor |
priorityDate | 1995-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 18.