http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-3774115-B2
Outgoing Links
Predicate | Object |
---|---|
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 |
filingDate | 2000-11-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2006-05-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2006-05-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-3774115-B2 |
titleOfInvention | Method and apparatus for anisotropic etching of silicon |
priorityDate | 2000-11-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Predicate | Subject |
---|---|
isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559541 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5461123 |
Total number of triples: 11.