| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_be055db3c1a09879df07379ba969e223 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32009
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32642
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68785
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67069
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32532
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67126
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6831 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-687
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 |
| filingDate |
2004-07-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2007-03-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e64b3d85723f138e6fd859fdbeaca4ad
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e02471a5d7cb5b16ca3bd73e6de25391
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4660a8f141b1ccbd295e02a948da37d8 |
| publicationDate |
2007-03-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-602004003254-T2 |
| titleOfInvention |
PLASMA PROCESSING DEVICE |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10796932-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8513097-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-112008002643-B4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9401286-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9842750-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11551943-B2 |
| priorityDate |
2003-07-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |