http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2573108-B2
Outgoing Links
Predicate | Object |
---|---|
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-56 |
filingDate | 1991-06-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 1997-01-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 1997-01-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2573108-B2 |
titleOfInvention | Plasma processing method |
priorityDate | 1991-06-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 25.