http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007281019-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_36d1d9c59848bff6ad5f55923d1290f5 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-105 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8246 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L43-12 |
| filingDate | 2006-04-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c90a19e84e89c6b700e8600fdb39f03c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ae4f5fa6d8ca3e9c751300a6cfc79fe3 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c2c32228bb567f6784f75d6a1ed80dbb http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_de4d4a478a93e3536e8dcbdce4c6734a |
| publicationDate | 2007-10-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2007281019-A |
| titleOfInvention | Etching apparatus and etching method |
| abstract | An etching apparatus for accurately etching a magnetic material and an etching method for reliably detecting the end point of etching of the magnetic material are provided. In a helicon wave plasma etching apparatus, a processing chamber for performing a plasma etching process on a wafer is provided, and a stage portion is disposed in the processing chamber. The stage unit 3 is provided with a magnetic detection unit 13 for detecting magnetism, and the magnetic detection unit 13 is connected to a control unit 14. A bell jar 8 is provided above the processing chamber 2, and a helicon coil 9 and a magnetic field coil 11 are disposed on the outer periphery thereof. An RF power supply 10 for supplying predetermined power is connected to the helicon coil 9. [Selection] Figure 1 |
| priorityDate | 2006-04-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2244 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419556224 |
Total number of triples: 18.