http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009267111-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate | 2008-04-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c4d4bc316bd12b6662a44957e1fe3812 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_124605f184cacf24d1ec01748a229026 |
| publicationDate | 2009-11-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2009267111-A |
| titleOfInvention | Semiconductor device manufacturing method, manufacturing apparatus, computer program, and computer-readable storage medium |
| abstract | A semiconductor device manufacturing method capable of adjusting the size of a portion whose size is to be controlled, and a semiconductor device manufacturing apparatus suitable for the method. The disclosed semiconductor device manufacturing method includes a dimension measuring step S8 for measuring a dimension of a part whose dimension is to be controlled; whether or not a measured value obtained in the dimension measuring step S8 is larger than a reference value. Determination steps S9 and S11 for determination; and a first step for reducing the part when the measurement value is determined to be larger than the reference value in the determination steps S9 and S11, and the measurement value is smaller than the reference value in the determination step A dimension adjustment step of performing any one of the second step of increasing the region when it is determined that [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7169866-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020096137-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7178918-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010010278-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013544028-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020123646-A |
| priorityDate | 2008-04-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 35.