http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4558285-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J19-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B7-00 |
| filingDate | 2003-06-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2010-10-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2010-10-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-4558285-B2 |
| titleOfInvention | Plasma cleaning method and substrate processing method |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10481053-B2 |
| priorityDate | 2003-06-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 18.