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publicationNumber JP-2012508467-A
titleOfInvention Plasma-resistant coating for plasma chamber parts
abstract Plasma-resistant coating materials, plasma-resistant coatings, and methods of forming such coatings on hardware components. In one embodiment, the hardware component is an electrostatic chuck (ESC) and the plasma resistant coating is formed on the surface of the ESC. The plasma resistant coating is formed by methods other than thermal spraying, thereby providing a plasma resistant coating having advantageous material properties.
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