http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020522131-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32357 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67167 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-306 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30621 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-308 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32135 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32136 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate | 2018-05-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2020-07-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2020522131-A |
| titleOfInvention | Method of anhydrous etching |
| abstract | An exemplary cleaning or etching method may include flowing a fluorine-containing precursor into a remote plasma region of a semiconductor processing chamber. The method can include forming a plasma in a remote plasma region to generate a plasma effluent of a fluorine-containing precursor. The method may further include flowing the plasma effluent into the processing region of the semiconductor processing chamber. The substrate may be positioned within the processing region, and the substrate may include exposed oxide regions and exposed metal regions. The method may further include providing a hydrogen-containing precursor to the processing zone. The method may further include removing at least a portion of the exposed oxide. [Selection diagram] Fig. 4B |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2023058582-A1 |
| priorityDate | 2017-05-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 60.