http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4154253-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B3-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B3-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B3-10 |
| filingDate | 2003-02-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2008-09-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2008-09-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-4154253-B2 |
| titleOfInvention | Silicon plate for plasma processing |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102041055-B1 |
| priorityDate | 2003-02-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 22.