http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-503478-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_80787665b837ed3eb503bbcd27c0043a |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-0225 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-564 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4401 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3299 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-56 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-47 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N15-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N15-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 |
| filingDate | 2001-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2002-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9ad8a6aebd2c64ac2dd4b126b904c155 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d09e496d53f2e3a37e19ea360bbed487 |
| publicationDate | 2002-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-503478-B |
| titleOfInvention | Method and apparatus for detecting floating particles in a plasma processing chamber and apparatus for processing a semiconductor device |
| abstract | In order to allow particles suspended in a processing chamber to be detected using a single observation window and an optical system formed as a single unit and in order to provide precise detection of very weak particle-scattered light, when a desired film-forming/processing operation is being performed on a body being processed in a processing chamber, a beam that is P-polarized and that is intensity amplified at a frequency different from an excitation source frequency and integer multiples thereof is passed through an observation window sloped to form a Brewster angle relative to the P-polarized entry beam. Back-scattered light scattered by particles in the processing chamber passes through the same observation window for being received and imaged by a detection optical system. The frequency component described above and the intensity-modulated beam wavelength component are detected from the received light signal. These detected components and the image information imaged as described above is used to determine the quantity, sizes, and distribution of the particles. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I783980-B |
| priorityDate | 2000-08-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 37.