| abstract |
A film forming device of this invention includes a vacuumizable processing container, a carrier arranged in the processing container for carrying subjects to be processed, a processing gas supply means for supplying processing gas to the processing container, and a heating means for heating the subjects to be processed that are supported on the carrier. In addition, lateral and lower sides of the carrier are surrounded by means of a spacer wall. Furthermore, an inert gas supply means is employed to introduce inert gas into the carrier side area surrounded by the spacer wall. Besides, a clearance forming member is arranged above a peripheral edge portion of the subjects to be processed supported on the carrier to define a clearance at the inner peripheral side thereof, and is also arranged above the spacer wall to define a space at the outer peripheral side thereof. |