| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8ec8fa3852f83adfe33d4c402bff319c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ee1c19da359446fb5c4f0458a57b783d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bb4ee28d43b5e8d4a3c5141fa9bcfeb0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9bceffddb90b9b3da8a772212961764b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_da68369a089b07b3df3a28330348ddcf |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-302 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-08 |
| filingDate |
1997-11-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2009-04-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_266da2eba443edb99e99c1326627a3c3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b4e636e714b0f631e9e2c4e95e776bda
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_313f35ee28c72121d69147ee57a3157d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_57df795cad9eb65a83afa12246c997ff
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_121fdaaca2c7c707c6d4a0e8a57a575b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6cabee10075a1f1f6d0c5f31d7f5e0cd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d93341eb0ec56a1517c632d8cd5841ad
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_17970db61ae5b68c6addedf08a39e022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1e8cd956d89929b0307078378183dc33 |
| publicationDate |
2009-04-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-1014433-B1 |
| titleOfInvention |
Dry etching gas |
| priorityDate |
1996-11-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |