http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0010657-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31138 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J19-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08J7-00 |
| filingDate | 1979-10-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 1984-09-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 1984-09-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | EP-0010657-B1 |
| titleOfInvention | Selective etching of polymeric materials embodying silicones via reactor plasmas |
| priorityDate | 1978-10-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 149.