http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102013114118-B4
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_57548e977691b443c1d38abe3acc65cd |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32752 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32743 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32669 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-56 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate | 2013-12-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2018-09-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_65bb5e78e4bc6db8125ebf2730a76828 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_35899a080d25db1579bbfb26b99633ad |
| publicationDate | 2018-09-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | DE-102013114118-B4 |
| titleOfInvention | The plasma processing apparatus |
| abstract | A plasma processing apparatus (100) comprising: a vacuum chamber (202), a transport device for transporting a substrate (120) through a treatment area (110) in the vacuum chamber (202), an anode (108) within the treatment area (110) for providing a plasma in the treatment area (110); and • a treatment area limiting housing structure (112) electrically shielding the anode (108) from the vacuum chamber (202) and having at least one opening (112a, 112b), wherein the housing structure (112) and the transport device are arranged such in that the substrate (120) transported through the treatment area (110) can be transported through the at least one opening (112a, 112b) of the housing structure (112) into the treatment area (110) and / or out of the treatment area (110). |
| priorityDate | 2013-12-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 26.