http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20210074040-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_799858790a0d932d2bf525d1f2324ad6 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68785 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6833 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-687 |
| filingDate | 2019-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_666eb02c118df9af2e5b008e7d97905c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_862f5a812c9d9395df5b636e962427f1 |
| publicationDate | 2021-06-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20210074040-A |
| titleOfInvention | Component for protecting bonding layer and system for treating substrate with the component |
| abstract | Provided are a bonding protection member for protecting a bonding layer for bonding an aluminum base plate constituting a substrate support unit and a ceramic puck from etching gas, and a substrate processing system including the same. The substrate processing system may include a housing; a shower head unit installed in the housing and supplying a process gas for processing the substrate into the housing; a substrate support unit installed under the shower head unit in the interior of the housing and including a base member and a chucking member adhered to the base member through a bonding layer and on which the substrate is seated; a plasma generating unit that generates plasma by using a process gas to process the substrate; and a bonding protection member formed to surround the outer surface of the bonding layer to protect the bonding layer, and formed of a material having corrosion resistance. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2023033339-A1 |
| priorityDate | 2019-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 21.