| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32174
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H02M7-445
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H02M7-533
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-321 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H02M7-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-507
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H02M7-533 |
| filingDate |
2000-10-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2002-07-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_513f7ff5f20612174d412df4713b698f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_99c4188206f44f6c648b09bd96fbf6f3 |
| publicationDate |
2002-07-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-494708-B |
| titleOfInvention |
Radio frequency power source for generating an inductively coupled plasma |
| abstract |
A system for converting DC power into a RF electromagnetic field in a processing chamber, the system being composed of: a coil constructed to surround the processing chamber; and a RF power generator including a free- running oscillator having a DC power input and an RF power output, the power output being connected to a load impedance which includes the coil for supplying RF current to the coil at a frequency which is dependent on the load impedance. |
| priorityDate |
1999-07-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |