| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3244 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F4-00 |
| filingDate |
1980-04-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1983-09-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
1983-09-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0019370-B1 |
| titleOfInvention |
Plasma reactor apparatus and process for the plasma etching of a workpiece in such a reactor apparatus |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I478771-B |
| priorityDate |
1979-05-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |