http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-3180438-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-68 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-509 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23Q3-15 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23Q3-08 |
| filingDate | 1992-05-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2001-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2001-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-3180438-B2 |
| titleOfInvention | Plasma processing device substrate fixing method |
| priorityDate | 1992-05-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID25135 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415712843 |
Total number of triples: 16.