Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8cf8d77ac0eff1767b22d2fb9445b64d |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45536 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3299 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45591 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32834 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32816 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45587 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45517 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-52 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4417 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32633 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3244 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32642 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32449 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-455 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32623 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-509 |
filingDate |
2012-03-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_77a01770819b3294fe9bed3593ec41d0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e9b1e2dc8e2ca163e5e4fea4aab1953c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b42b480e00ab91f9c832f1a601d0da50 |
publicationDate |
2012-08-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
JP-2012151482-A |
titleOfInvention |
Apparatus and method for gas flow conductance control in a capacitively coupled plasma process chamber |
abstract |
[PROBLEMS] To improve plasma density and etching uniformity. In order to form an air gap, the flow conductance of plasma formed in a plasma processing apparatus including an upper electrode on the opposite side of the lower electrode is controlled. The lower electrode 104 is configured to support the substrate and is coupled to the RF power source 110. The process gas injected into the gap is excited into a plasma state during operation. The apparatus includes a ground ring that concentrically surrounds the lower electrode and has a slot set therein, and a mechanism 108 for controlling gas flow through the slot. [Selection] Figure 1 |
priorityDate |
2006-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |