http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008103323-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f6f175f2c8eac40363953838045e7c40 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-246 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32605 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-246 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32724 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32009 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32348 |
| classificationIPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-50 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate | 2007-10-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_47cef376527b6dde156f06c7d4dfe128 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2e635c2f30543443c88f22c9bb09eb5c |
| publicationDate | 2008-05-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2008103323-A |
| titleOfInvention | Plasma generator, substrate cleaning method, and display substrate manufacturing method including the same |
| abstract | An object of the present invention is to provide a plasma generator that minimizes electrode deformation and maintains a constant distance between dielectrics. [Solution] In the present invention, a pair of dielectric plates 52 and 52 ′ are detachably installed on the nozzle head 50. For this reason, the upper ends of the dielectric plates 52 and 52 ′ are sandwiched between seating slits 49 formed in the lower portion of the chamber housing 46, and the lower ends of the dielectric plates 52 and 52 ′ are connected to the lower ends of the electrode cover 58. It is fixed by being placed on the formed stepped portion 59. In order to maintain a gap 53h between the dielectric plates 52 and 52 ', spacers 64 are inserted at both ends of the gap 53h. According to the present invention having such a configuration, the gap between the dielectric plates can be maintained constant, so that uniform plasma can be formed, and the replacement and maintenance of the dielectric plates are facilitated. There is. [Selection] Figure 3 |
| priorityDate | 2006-10-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5359268 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419491804 |
Total number of triples: 23.