http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2564663-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F4-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 |
| filingDate | 1989-10-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 1996-12-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 1996-12-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2564663-B2 |
| titleOfInvention | Vapor phase etching equipment |
| priorityDate | 1989-10-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 14.