| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fd446fb0d73aa96d044fea2eaa3c8ebc |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2203-033
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-0109 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-0019
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76879
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D1-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B3-0086 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-283
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D1-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D1-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F4-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 |
| filingDate |
1998-07-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_79e9ebfb45f25f65ab36c226f771df8a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f5d931032dbc137bec6b283c01993360 |
| publicationDate |
2003-03-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CH-693158-A5 |
| titleOfInvention |
A process for the production of metallic microstructures. |
| priorityDate |
1997-07-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |