http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013511807-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32256 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32311 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32192 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32229 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-511 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01P5-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate | 2010-11-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2013-04-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2013511807-A |
| titleOfInvention | Tuning hardware for plasma ashing apparatus and method of use thereof |
| abstract | A continuously variable microwave circuit tunable to operate under a plurality of distinct operating conditions includes a waveguide configured with a tunable element having a core configured to protrude into the waveguide; An actuator operating in conjunction with the tunable element to selectively change the length of the core protruding into the waveguide to minimize the output of the microwave reflected by plasma ashing; The controller is configured in conjunction with the actuator to selectively drive the actuator in response to changes in a plurality of operating conditions. |
| priorityDate | 2009-11-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 30.