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filingDate 1999-08-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2001-07-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber EP-1114805-A1
titleOfInvention Plasma-resistant member and plasma treatment apparatus using the same
abstract A plasma-resistant member used in a reaction chamber of anplasma treating apparatus is formed of a dense alumina sinterednproduct having an average grain size of 18 - 45 µm, a surfacenroughness Ra of 0.8 - 3.0 µm and a bulk density of 3.90 g/cm 3 ornover.
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