http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101289617-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68742 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32009 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32192 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67069 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-46 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46 |
| filingDate | 2009-06-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2013-07-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2013-07-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101289617-B1 |
| titleOfInvention | Plasma processing apparatus, plasma processing method and manufacturing method of electronic device |
| abstract | The plasma processing apparatus according to the present invention includes a processing vessel capable of maintaining an atmosphere that is reduced in pressure than the atmosphere, exhaust means for reducing the inside of the processing vessel to a predetermined pressure, and gas introduction for introducing a process gas into the processing vessel. Means, a microwave introduction means for introducing microwaves into the interior of the processing container, a lifter pin penetratingly inserted into a mounting table provided in the interior of the processing container, and supporting a workpiece on an end face; When the plasma is ignited by introducing the microwave, the object to be processed is supported by the lifter pin at a first position near the upper surface of the mounting table, and after the plasma is ignited, the object is processed by the lifter pin. The water is supported at a second position farther from the mounting table than the first position. All. According to the present invention, the ignition rate of the plasma can be improved. |
| priorityDate | 2008-06-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 19.