| abstract |
Methods are provided for removing material from films, such as metal nitride films, on a workpiece. One example implementation relates to a method for processing a workpiece. The workpiece may include a film (eg, a metal nitride film). Methods may include generating one or more nuclides (eg, hydrogen radicals, excited noble gas molecules, etc.). The method may include mixing an alkyl halide with one or more nuclides to generate one or more alkyl radicals. The method can include exposing the membrane to one or more alkyl radicals. |