http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2618817-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4405 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B33-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B35-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 |
| filingDate | 1993-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 1997-06-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 1997-06-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2618817-B2 |
| titleOfInvention | Non-plasma cleaning method in semiconductor manufacturing equipment |
| priorityDate | 1993-07-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 19.